Ultrahigh vacuum magnetron sputtering system (JGP560CC)

Pulsed laser deposition system (PLD-450)

Laser molecular beam epitaxial deposition system  (LMBE-450)

Ion beam etching system (LKJ-3D-150)

Ultrahigh vacuum annealing furnace (SGL-60)

Chemical vapor deposition system

Super-clean laboratory

Sputtering  and E-beam integrated System

Vibrating sample magnetometer (Model 7407)

UV-vis spectrophotometer (U-3310)

Surface Profiler (P-7)

Scanning probe microscopy (AFM/MFM/STM)

Superconducting quantum interference device (SQUID)

Scanning electron microscopy (JSM-7500F)

Transmission Electron Microscope (JEM-2100)

Physical Property Measurement System

X-ray  diffraction system (Ultima IV)